Thermal Activation of Crystalline Silicon Ions in Alkaline Solution
نویسندگان
چکیده
منابع مشابه
Thermally Induced Activation Energy of Crystalline Silicon in Alkaline Solution
Etching of crystalline silicon by potassium hydroxide (KOH) etchant with temperature variation has been studied. Results presented here are temperature dependent ER (etch rate) along the crystallographic orientations. Etching and activation energy are found to be consistently favorable with the thermal agitation for a given crystal plane. Study demonstrates that the contribution of microscopic ...
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ژورنال
عنوان ژورنال: Scientific World
سال: 1970
ISSN: 1996-8949
DOI: 10.3126/sw.v7i7.3817